High Purity

Next level cleaning

High Purity

High Purity

Cleaning for Semiconductors, Optics & Precision Engineering

Industrial ultra-fine cleaning at the atomic level – with validated process reliability

High purity cleaning – because every detail counts.

In semiconductor, optical, medical, and precision engineering, absolute cleanliness determines performance and reliability. When components with complex geometries need to be cleaned at the molecular level, down to particles as small as 0.5 μm and without leaving any residue, standard technology is not enough. At BvL, we combine our understanding of processes and materials with tailor-made plant technology and tailor the cleaning process precisely to your requirements.

Results are verified under real conditions in our technical center. Test runs with original components—including UV-A examination in our own darkroom and particle measurement (PMC)—reliably demonstrate the cleaning performance.

Our technical consulting and BvL's worldwide service support you as a clean service provider or manufacturer on your way to stable and traceable processes.

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Your key advantages at a glance:

High Purity – cleanliness at the highest level:

We achieve component cleanliness down to 0.5 μm particle size and residue-free at the molecular level.

Verifiable process reliability:

Our processes are fully documentable – with seamless traceability.

Expertise in materials and geometries:

We clean with ultrapure water (UPW), ultrasound, and vacuum technology; compatible with sensitive materials such as titanium, aluminum, and PEEK – even with complex geometries.

Your requirements:

Cleanliness up to grade 1 – process-reliable, validatable, seamlessly integrable

  • Increasing demands on particulate and molecular cleanliness – for example, for Grade 1 components
  • Reliable cleaning of complex geometries and delicate microassemblies
  • Validatable processes that are thoroughly documented and reproducible
  • Integration into existing production environments or cleanrooms
  • Removal of residual organics and residual moisture, as well as compliance with atomic/molecular limit values
Your requirements:
Semiconductor industry:

Cleaning complex ultra-high-vacuum (UHV) components, parts for EUV and DUV lithography, housings, carriers, wafer-handling systems

Requirements:
Extremely low particle count down to 0.5 µm, controlled outgassing of H₂O and hydrocarbons, HIO elements in low atomic-percent ranges

Optics industry:

Ultra-fine cleaning of lenses, prisms, filters, mounts, opto-mechanical assemblies


Objective:
Residue-free surfaces before coating or assembly; highest purity for sensitive materials

Precision engineering:

Cleaning micro-assemblies, bearings, springs, sensors, components with tight tolerances


Focus:
Secure removal of machining residues such as coolants, oils, and particles without affecting the material

Our solution:

Flexibly configurable precision cleaning systems

For the highest demands, with measurable cleanliness and reliable support in all project phases. The modular systems can be precisely adapted to customer-specific processes. The range of applications extends from oil- and greasefree pre-cleaning to qualified final cleaning in accordance with grades 1–4.

At BvL, we are developing the next stage of industrial precision cleaning – precise, reproducible, and tailored to your application.

Possible processes

Vacuum impulse technology (VIT)
Deep cleaning using implosion power: innovative pressurechange process for improved media exchange and enhanced contaminant removal. Ideal for components with complex geometries, narrow channels, and blind holes. The VIT process can be integrated into any Niagara series system and, in the future, also into the Atlantic immersion cleaning system.

Ultrasonic cleaning
e.g., 40, 80, and 132 kHz, multi-frequency systems, ultrasonic generators with sweep function for delicate geometries.

Spray/flood cleaning
Powerful all-round cleaning through special nozzle frames and flooding of the cleaning chamber (continuous partial flooding, full/vacuum flooding, recirculating flooding)

Immersion cleaning
Perfectly coordinated combination of different cleaning processes in a multi-stage system. The treatment processes and number of tanks can be individually adapted.

Drying
Vacuum drying, recirculating air and hot air drying with HEPA filter, air blow-off, infrared drying – used alternatively or in combination

Our systems:

Configurable to your needs – perfectly matched to your component and your process

NiagaraUp:

NiagaraUp: NiagaraUp:

Basket cleaning system with Vacuum Impulse Technology (VIT)

The NiagaraUP combines a compact design with high process depth for top-level cleanliness.. All process steps are carried out in a single chamber saving space.

The system design prevents recontamination and cross-contamination. Amoung other things through, electropolished surfaces and a rounded chamber design, as well as special processes such as chamber cleaning with UPW (ultrapure water), rapid complete draining, etc.


Process
The key feature here is Vacuum Impulse Technology (VIT), which reliably removes residues even in capillaries, boreholes, and cavities. In addition, spray and flood cleaning (stepless partial flooding, full/vacuum and recirculating flooding) as well as HEPA-filtered hot air and vacuum drying extend the process into a complete solution for high purity requirements. All processes are individually configurable.

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Atlantic:

Atlantic: Atlantic:

Atlantic immersion cleaning system

The Atlantic multi-chamber immersion system is an optimal inline solution for the highest cleanliness requirements with high throughputs.

Components are immersed by means of an automated portaltransfer system into sequentially arranged tanks with differenttreatment stages. The number of tanks can vary.

Process
Immersion cleaning, phosphating, spraying, injection cleaning, ultrasonic cleaning (optional), rinsing, passivation, and optional drying are available. This wide range allows precise configuration of the cleaning process.

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Shared strengths:
  • Modularity: multiple tanks and chambers possible
  • Freely configurable program sequence: The order, number, and combination of all cleaning steps can be selected completely individually.
  • Seamless traceability of process parameters: documentable,audit- and validation-capable.
  • Reliable integration into production processes and cleanrooms.
  • Use of DI and ultrapure water (UPW) with low conductivity and TOC values.
  • Drying options: HEPA-filtered recirculating air and hot air drying, infrared and vacuum drying.
  • System quality (made in Germany), high-quality and durable materials, electropolished surfaces, stainless steel in V4A quality
  • Usable as a pre-washer and final washer
Get in touch with us!

We will find the optimal solution for your high purity application!

Would you like to have components tested, request a quote, or learn more about our Atlantic series?

Contact us now without obligation or book a consultation.

We would be happy to advise you personally on cleaning solutions for your applications.